MEMS Laser Scan Projection Solution

We provide complete MEMS laser scan projection solution including MEMS projection chipset, and reference designs of pico-projector engine and pico-projector module. The MEMS projection chipset includes:

2D MEMS mirror
  • Raster scan 2D MEMS mirror
  • MEMS position sensor
  • Scan display controller

Pico Projector engineThe pico-projector solution offers wide color gamut, high contrast and focus free projection display. The pico-projector engine can be as small as 1.5cc volume and 5mm thick. High brightness solution of 37 lumen is available with multiple RGB lasers and larger engine dimension.


Pico projector engine

2D MEMS Scanning Mirrors

Our 2D MEMS mirror comes in two operation principle, bi-resonant scan and raster scan for two dimensional laser scan applications. Standard mirror coating is Al for visible wavelength range applications and Au as optional coating for NIR and IR applications. Raster scan type is designed for high resolution imaging applications.

Raster scan

  • Fast axis designed for resonant operation
  • Fast axis driven by PWM voltage signal
  • Slow axis motion controllable with voltage waveform
  • Slow axis capable of point and fix angle control
  • Support HD720P progressive image display

Bi-resonant scan

  • Both axes are driven by PWM voltage signals
  • Sinusoidal motion in both axes
  • Angle controlled by PWM voltage, duty and frequency
  • 2D MEMS mirror valuation kit available
Product Name OP-6111 OP-6200 OP-7200
Product photo 2D MEMS bi-resonant 2D MEMS WVGA 2D MEMS 720P
Type of motion Bi-resonant Raster scan Raster scan
Support resolution Lissajous scan 480P 720P
Mirror size 1 mm circular 1 mm circular 1 mm circular
Mirror coating Al or Au Al or Au Al or Au
Frequency: fast axis 22,000Hz 18,500Hz 26,000Hz
Frequency: slow axis 1,400Hz controllable controllable
Optical scan angle: fast axis +/-20o +/-22o +/-22o
Optical scan angle: slow axis +/-15o +/-12o +/-12o
Package footprint 6mm x 8mm 4.8mm x 8mm 4.8mm x 8mm
Status Available 2017Q4 2017Q4

1D MEMS Scanning Mirrors

Our 1D MEMS mirror device is designed for resonant operation to achieve large optical scan angle. They are suitable for IR and NIR laser scan applications such as 3D depth sensing, gesture sensing, LiDAR, bio-medical sensing, laser printing, etc.

  • Millimeter size mirror designed for resonant operation
  • Au coated mirror optimized for NIR and IR application
  • Control by PWM voltage signal
  • Sinusoidal motion with low scan jitter
  • Angle controlled by PWM voltage, duty and frequency
  • 1D MEMS mirror valuation kit available
Product Name BA0050 DC0200 LB0250
Product photo 1D MEMS 500Hz 1D MEMS 1.4x1.4mm 1D MEMS 4x1mm
Mirror size 2.5mm x 3.0mm 1.4mm x 1.4mm 4.0mm x 1.0mm
Mirror coating Au Au Au
Resonant frequency 500Hz 1,800Hz 2,500Hz
Max optical scan angle +/-26o +/-40o +/-40o
Package PLCC PLCC or Bare die CLCC
Status Out of stock Available Out of stock

Resonant MEMS Evaluation Kit

The resonant MEMS evaluation kit (EVK) is designed to allow quick installation and implementation of MEMS scanning mirror for your applications. The EVK includes:

  • Resonant MEMS scanning mirror on PCB
  • MEMS control board
  • MEMS PCB connection cable
  • Software CD
  • USB to RS232 cable
  • 5V power USB cable

The software provides a GUI to control the output signal of the control board to drive the MEMS scanning mirror.

  • Manual control of drive signal frequency
  • Manual control of drive signal duty ratio
  • Automatic sweep down of drive signal frequency

MEMS EVK