Opus Microsystems is devoted to provide high resolution and high accuracy 3D depth sensing solutions based on its proprietary MEMS laser projection technology. The solutions are available to cover distances ranging from a few centimeters with coded structured light 3D depth camera to hundreds of meter with MEMS LiDAR.
With the fast development and adoption of ADAS in modern automobiles, AR Head-Up Display becomes an important feature for smart digital cockpit to improve safety and driving experience. Opus Microsystems provides complete AR Head-Up Display solution based on proprietary MEMS laser projection technology.
Opus Microsystems' 1D and 2D MEMS scanning mirror are designed with electrostatic micro-actuator monolithically integrated with the mirror based on proprietary IPs. The MEMS mirrors offer excellent performance at ultra low power consumption in the most compact package in the market. The MEMS mirrors are fabricated by our world class strategic MEMS manufacturing partners for large volume production.
Features of Opus Microsystems' MEMS scanning mirrors
Our 1D MEMS mirrors are designed for resonant operation with optical scanning angle as large as 86 deg. Millimeter size mirrors with resonant frequencies in the range from 500Hz to several kilohertz are available.
The 1D MEMS mirror is coated with gold for high reflectivity in NIR and IR applications such as structured light projection for 3D camera, bio-medical sensing, laser printing, LiDAR and etc.
We developed both resonant scan and raster scan 2D MEMS scanning mirrors with gimbaled architecture to allow the mirror to oscillate about two orthogonal axes. The raster scan 2D MEMS mirror is designed with resonant motion in the fast axis and controllable motion in the slow axis to realize HD720P or higher resolution projection display. The bi-resonant 2D MEMS mirror can be driven by PWM signals for resonant oscillation in both axes for a lissajous scanned pattern.